Conditions of Formation of α- and β-Modifications of Ge3N4 and Preparation of Germanium Oxynitride Dielectric Films. J. Coat. Sci. Technol. [Internet]. 2024 Sep. 4 [cited 2026 Jan. 15];11:1-5. Available from: https://neolifescience.com/index.php/jcst/article/view/9760