Reactively Magnetron Sputter-Deposited Ti (C,N) Nanocomposite Thin Films: Composition and Thermal Stability . J. Coat. Sci. Technol. [Internet]. 2018 Nov. 12 [cited 2026 Jan. 15];5(2):42-9. Available from: https://neolifescience.com/index.php/jcst/article/view/5697