Growth of Si-Doped Polycrystalline Diamond Films on AlN Substrates by Microwave Plasma Chemical Vapor Deposition. J. Coat. Sci. Technol. [Internet]. 2021 Jul. 13 [cited 2026 Jan. 15];2(2):38-45. Available from: https://neolifescience.com/index.php/jcst/article/view/3276