Conditions of Formation of α- and β-Modifications of Ge3N4 and Preparation of Germanium Oxynitride Dielectric Films. Journal of Coating Science and Technology, [S. l.], v. 11, p. 1–5, 2024. DOI: 10.6000/2369-3355.2024.11.01. Disponível em: https://neolifescience.com/index.php/jcst/article/view/9760. Acesso em: 15 jan. 2026.