Growth of Si-Doped Polycrystalline Diamond Films on AlN Substrates by Microwave Plasma Chemical Vapor Deposition. Journal of Coating Science and Technology, [S. l.], v. 2, n. 2, p. 38–45, 2021. DOI: 10.6000/2369-3355.2015.02.02.1. Disponível em: https://neolifescience.com/index.php/jcst/article/view/3276. Acesso em: 15 jan. 2026.